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Introduction to Semiconductor Process 1 

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Introduction to Semiconductor Process 1
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Coursera 
Overview

Duration

4 hours

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Total fee

Free

Mode of learning

Online

Official Website

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Credential

Certificate

Introduction to Semiconductor Process 1
 at 
Coursera 
Highlights

  • Earn a certificate from Korea Advanced Institute of Science and Technology(KAIST)
  • Add to your LinkedIn profile
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Introduction to Semiconductor Process 1
 at 
Coursera 
Course details

What are the course deliverables?
  • What you'll learn
  • Learn about modern semiconductor process
More about this course
  • This course aims to provide a general understanding of semiconductor process. This course explores the principles and basic theory of semiconductor device and process. Furthermore, the students will learn the overall semiconductor process such as oxidation, diffusion, ion implantation, lithography, etching, thin film deposition, plasma, metallization, and packaging. The lecture notes can be downloaded with registration, that helps students watch the videos. There are quiz problems to check your understanding of the lectures. To receive course certificate., you must score at least 60% of quiz within two chances.

Introduction to Semiconductor Process 1
 at 
Coursera 
Curriculum

Week 1 Overview of MOSFET theory

Introduction

1-1 Semiconductor process and Overview: MOSFET

1-2 Short Channel Effect

Week 1 lecture note

Week 2 lecture note

Week 1 Quiz

Week 2 CMOS Process Integration

CMOS Process Integration

Week 3 lecture note

Week 2 Quiz

Week 3 Cleanroom, RCA Cleaning Crystal Growth

Cleanroom, RCA Cleaning Crystal Growth

Week 4 lecture note

Week 3 Quiz

Week 4 Diffusion & Doping

Diffusion : Drive-in, Rapid Thermal Anneal, Flash Lamp Anneal, Diffusion Mechanism

Diffusion Equation, Predep & Drive-in, PN Junction by Predep & Drive

Week 5 lecture note

Week 4 Quiz

Week 5 Oxidation

Oxidation

Week 6 lecture note

Week 5 Quiz

Week 6 Ion Implantation

Ion Implantation

Implantation Mask

Week 7 lecture note

Week 6 Quiz

Week 7 Lithography

Photolithography

Light Source

Stepper & Alignment

Week 8 lecture note

Week 7 Quiz

Week 8 EUV Lithography

EUV Lithography

New Quiz

Introduction to Semiconductor Process 1
 at 
Coursera 
Admission Process

    Important Dates

    May 25, 2024
    Course Commencement Date

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    Introduction to Semiconductor Process 1
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