Introduction to Semiconductor Process 1
- Offered byCoursera
Introduction to Semiconductor Process 1 at Coursera Overview
Duration | 4 hours |
Total fee | Free |
Mode of learning | Online |
Official Website | Explore Free Course  |
Credential | Certificate |
Introduction to Semiconductor Process 1 at Coursera Highlights
- Earn a certificate from Korea Advanced Institute of Science and Technology(KAIST)
- Add to your LinkedIn profile
Introduction to Semiconductor Process 1 at Coursera Course details
- What you'll learn
- Learn about modern semiconductor process
- This course aims to provide a general understanding of semiconductor process. This course explores the principles and basic theory of semiconductor device and process. Furthermore, the students will learn the overall semiconductor process such as oxidation, diffusion, ion implantation, lithography, etching, thin film deposition, plasma, metallization, and packaging. The lecture notes can be downloaded with registration, that helps students watch the videos. There are quiz problems to check your understanding of the lectures. To receive course certificate., you must score at least 60% of quiz within two chances.
Introduction to Semiconductor Process 1 at Coursera Curriculum
Week 1 Overview of MOSFET theory
Introduction
1-1 Semiconductor process and Overview: MOSFET
1-2 Short Channel Effect
Week 1 lecture note
Week 2 lecture note
Week 1 Quiz
Week 2 CMOS Process Integration
CMOS Process Integration
Week 3 lecture note
Week 2 Quiz
Week 3 Cleanroom, RCA Cleaning Crystal Growth
Cleanroom, RCA Cleaning Crystal Growth
Week 4 lecture note
Week 3 Quiz
Week 4 Diffusion & Doping
Diffusion : Drive-in, Rapid Thermal Anneal, Flash Lamp Anneal, Diffusion Mechanism
Diffusion Equation, Predep & Drive-in, PN Junction by Predep & Drive
Week 5 lecture note
Week 4 Quiz
Week 5 Oxidation
Oxidation
Week 6 lecture note
Week 5 Quiz
Week 6 Ion Implantation
Ion Implantation
Implantation Mask
Week 7 lecture note
Week 6 Quiz
Week 7 Lithography
Photolithography
Light Source
Stepper & Alignment
Week 8 lecture note
Week 7 Quiz
Week 8 EUV Lithography
EUV Lithography
New Quiz
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